THIN-FILM MAPPING
Filmetrics, KLA InstrumentsRequest Info
The F50 thin-film mapping system unveiled by Filmetrics Inc. measures thickness and optical constants of films between 100 Å and 450 µm and also can measure refractive index. It performs 89-point mappings in <1 min. The system illuminates the sample with white light and measures the reflectance spectrum off the film, and software analyzes the spectrum to determine thickness, optical constants and other user-selectable parameters. Wavelength range is between 220 and 1700 nm.
https://www.filmetrics.com
/Buyers_Guide/Filmetrics_KLA_Instruments/c4936
Published: August 2004
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