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Thermal Management System

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BURGESS HILL, England, Nov. 2, 2016 — Thermal Management SystemThe Thermal Management System (TMS) from Edwards Vacuum helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by reducing vacuum or abatement pipework condensation.

The system adds feedback control to accurately maintain gas temperature in vacuum pump fore lines and exhaust lines. Unheated lines can be clogged by condensed process materials and by-products. The Smart TMS reduces downtime and risks to service personnel tasked with cleaning out these often hazardous materials.

The TMS also improves energy efficiency and functionality with programmable remote controllers that interface readily to fab control software.


Published: November 2016
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