Thin-film Metrology Instrument

k-Space Associates Inc.Request Info
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Thin-film Metrology InstrumentThe kSA Atomic Control for Epitaxy (ACE) thin-film metrology instrument from k-Space Associates Inc. is an accurate, high-resolution, in-situ instrument that monitors flux and growth rate of atomic species using the principle of atomic absorption spectroscopy.

The kSA ACE uses conventional hollow cathode lamps to generate atomic emission for the elements of interest. The instrument utilizes two high-sensitivity, UV-optimized solid-state spectrometers to measure each material of interest independently and with high accuracy, providing precise control over material-specific flux in multisource processes.

Applications include the fabrication of III-V and II-V compounds, semiconductor devices, thin-film sensors, solar cells, optical coatings, x-ray optics, flat-panel displays, and more.

Published: January 2022
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ProductskSAAtomic Control for Epitaxyacethin-film metrology instrumentk-Space AssociatesTest & MeasurementmetrologyLight SourcessemiconductorsOpticsDisplaysSensors & DetectorsAmericas

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