Two-axis Stage Motion System

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
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AUBURN, Mass., Feb. 3, 2022 — Two-axis Stage Motion SystemR-Theta two-axis stage motion systems from Physik Instrumente LP provide nm-precision motion in semiconductor test, metrology, manufacturing, and laser processing applications.

The stages are operated by ACS-based industrial motion controllers with ultrafast triggers for synchronization with external equipment such as cameras, sensors, or lasers. Fast controllers allow highly precise triggering with 0.01% time tolerance between signals. Trigger signals can be derived off absolute encoders or analog signals, enabling high- precision, safe, and simplified solutions.

Published: February 2022
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