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URB100CC Rotation Stage

MKS/NewportRequest Info
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IRVINE, Calif., May 7, 2010 — Newport Corp. has introduced the URB100CC high-speed rotation stage for motion applications that require fast moves over larger angles or continuous rotation at high duty cycles. It delivers high-precision performance relative to wobble, angular repeatability and speed stability.

Typical applications are lidar, 3-D imaging and film thickness measurements of semiconductor wafers.

It features a belt drive instead of a worm gear. The belt drive provides higher rotation speeds of up to 720°/s, without sacrificing lifetime. It also includes a proprietary four-point large-diameter contact ball bearing. This two-piece design provides good rigidity and high reliability, while minimizing wobble (50 µrad) and eccentricity (3 µm).

The enhanced low-profile package facilitates easy top-mounting options and is mechanically compatible with the company’s ILS linear stage series (the motor protrudes below the lower surface of the stage).

For added convenience, position feedback is provided by a motor-mounted 2000-point rotary encoder that produces 0.01° resolution. The base material is hardened steel with an aluminum body. The stage includes a DC servo motor and a 3-m-long cable.

Travel range is 360° continuous, minimum incremental motion is 0.02°, unidirection repeatability is 0.015°, and maximum torque is 0.6 nm. Mean time between failures is 20,000 h at 25% load and with a 30% duty cycle.
May 2010

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2000-point rotary encoder3-D imagingaluminumAmericasbelt drivecableDC servo motorfilm thickness measurementsfour-point ball bearinghardened steelimaginglidarmotion applicationsNewportProductsrotation stageTest & Measurementtop mountingURB100CC

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