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URB100CC Rotation Stage

MKS/NewportRequest Info
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Newport Corp. has introduced the URB100CC high-speed rotation stage for motion applications that require fast moves over larger angles or continuous rotation at high duty cycles. It delivers high-precision performance relative to wobble, angular repeatability and speed stability. Typical applications are lidar, 3-D imaging and film thickness measurements of semiconductor wafers. Instead of a worm gear, it features a belt drive, which provides rotation speeds of up to 720°/s, without sacrificing lifetime. It also includes a proprietary four-point large-diameter contact ball bearing. This two-piece design provides good rigidity and high reliability, while minimizing wobble (50 μrad) and eccentricity (3 μm). For added convenience, position feedback is provided by a motor-mounted 2000-point rotary encoder that produces 0.01° resolution.

Photonics Spectra
Jun 2010

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3-D imagingball bearingbelt driveeccentricityfilm thicknesslidarmotionNew ProductsNewport Corp.reliabilityresolutionrigidityrotary encoderrotationrotation speedrotation stagesemiconductorsTest & MeasurementURB100CCWaferswobbleworm gear

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