URB100CC Rotation Stage
MKS/NewportRequest Info
Newport Corp. has introduced the URB100CC high-speed rotation
stage for motion applications that require fast moves over larger angles or continuous
rotation at high duty cycles. It delivers high-precision performance relative to
wobble, angular repeatability and speed stability. Typical applications are lidar,
3-D imaging and film thickness measurements of semiconductor wafers. Instead of
a worm gear, it features a belt drive, which provides rotation speeds of up to 720°/s,
without sacrificing lifetime. It also includes a proprietary four-point large-diameter
contact ball bearing. This two-piece design provides good rigidity and high reliability,
while minimizing wobble (50 μrad) and eccentricity (3 μm). For added convenience,
position feedback is provided by a motor-mounted 2000-point rotary encoder that
produces 0.01° resolution.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: June 2010
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