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VIBRATION ISOLATION The Active Workstation 780 and Active Workstation 900 unveiled by Halcyonics GmbH are compact, ergonomically designed active vibration isolation systems. Applications include laser interferometers, semiconductor measurement and inspection systems, and scanning probe and laser scanning microscopes. The company says that the systems generate virtually no low-frequency resonance. Based on proprietary VarioControl technology, they isolate building vibration starting at 1 Hz with efficiencies of 94.38% from 5 Hz (25 dB), and 98.22% above 10 Hz (>35 dB). The control panel displays the settings of all parameters and continuously shows the vibration signals of the sensors and actuators as a bar graph.

Photonics Spectra
Aug 2005

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ConsumerHalcyonics GmbHinspection systemslaser interferometersMicroscopyNew Productssemiconductor measurementSensors & Detectorsvibration isolation systems

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