Vacuum Stages
Steinmeyer Inc.Request Info
Steinmeyer Inc. offers a range of precision stages suitable for
ultrahigh-vacuum applications. The model MT105-LM-HV is one example. A compact two-axis
(X-Z) version has a travel range choice of 30 or 50 mm. Positioning accuracy is
3 μm, with repeatability of ±0.2 μm. This product can be provided
as a classic X-Y stage without adapter plate or can be configured as an X-Y-Z system.
Driven by a piezo motor, each stage includes stainless steel crossed roller linear
bearings for smooth motion and robust load capacity. Both base and saddle are manufactured
from high-stiffness aluminum. All other components and hardware are selected for
ultrahigh-vacuum use. Exhibiting dynamic performance, the stages are suitable for
demanding positioning applications, including scanning electron microscopy.
https://www.steinmeyer.com
/Buyers_Guide/Steinmeyer_Inc/c14169
Published: September 2011
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