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Vacuum Stages

Steinmeyer Inc.Request Info
 
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Steinmeyer Inc. offers precision stages suitable for ultrahigh-vacuum applications. Model MT105-LM-HV is a compact two-axis (X-Z) version that offers a travel range of 30 or 50 mm. Positioning accuracy is 3 µm, with repeatability of ±0.2 µm. It can be provided as a classic X-Y stage without an adapter plate or can be configured as an X-Y-Z system. Driven by a piezo motor, each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high-stiffness aluminum. All other components and hardware are selected for ultrahigh vacuum use (1 x 10-9 torr). The stages are suitable for use in scanning electron microscopy, electron-beam processing and particle acceleration.

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Photonics Spectra
Aug 2011
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AmericasBasic ScienceBiophotonicscleanroom-assembledcrossed rollerCVCMselectron-beam processinghigh-stiffness aluminumlinear bearingslow collected volatile condensable materialslow outgassingMassachusettsMicroscopyMT105-LM-HVNew Productsparticle acceleratorpiezo motorscanning electron microscopySteinmeyerTest & Measurementtwo-axisvacuum stagesX-YX-Y-ZX-Z

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