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McBainInstruments_WaferHand.jpgThe Wafer Handler WL150 and WL200 series modules have been released by McBain Instruments. The semiautomatic wafer inspection devices offer throughput of 750 wafers per hour with smooth, reliable and safe handling of wafers up to 200 mm. The device can accommodate sizes either 3 to 6 in. (WL150) or 5 to 8 in. (WL200). The Class 1 cleanroom-compatible wafer handler also features “smart” stepper motors for the drive axis, motors that provide stall and fault detection, linear stages for smooth and repeatable action, and vacuum-touch end effectors with sensing capabilities.

Photonics Spectra
Jun 2007

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