Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Wafer Inspection System

Ultratech Inc.
Facebook Twitter LinkedIn Email Comments
SAN JOSE, Calif., Nov. 18, 2014 — A new optical in-line inspection system from Ultratech Inc. provides 3-D topographical information for producers of semiconductor wafers.

The Superfast 4G uses proprietary coherent gradient-sensing technology to perform direct, front-side 3-D measurement for patterned wafers, with a throughput of up to 125 wafers per hour. Its open architecture is intended to improve laser lithography performance.
Nov 2014
BusinessAmericasCaliforniaUltratechsemiconductorsinspectionmachine visionindustrialcoherent gradient sensing

view all
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2021 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.