Wafer Inspection System

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Wafer Inspection SystemThe nSpec® TURBO wafer inspection system from Nanotronics acquires images of a 300-mm sample at 1-µm resolution in 45 s.

The system enables the high-throughput inspection of wafers ranging from 50 to 300 mm and large panels 10× faster to detect, quantify, and classify defects and features of interest. The system allows for high-volume manufacturers to have a tool with single or multiple load ports that can produce high-resolution images in minutes.

Published: December 2021
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ProductsnSpec TURBOwafer inspection systemNanotronicsImagingWafersindustrialAmericas

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