Wafer Inspection System

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Wafer Defect Inspection SystemThe DI2800 Dark Field Wafer Defect Inspection System from Hitachi High-Tech Corp. is a high-speed metrology system designed to identify defects and particles on patterned wafers up to 8 in. in diameter.

With its high throughput and performance, the DI2800 can help ensure device reliability and safety, particularly for highly sensitive applications such as Internet of Things and automotive fields, where inspection is required. It uses scattering-intensity simulation technology to optimize illumination and detection optics, enabling highly sensitive inspection of patterned-wafer defects developed during the manufacturing process. It has a detection sensitivity of 0.1-μm standard particle size on mirrored wafers.

Published: June 2022
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ProductsDI2800Dark Field Wafer Defect Inspection SystemHitachi High-TechTest & MeasurementWafersAsia-Pacific

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