Wafer Inspection System

Hitachi High-Tech Corp.Request Info
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TOKYO, March 25, 2024 — Hitachi Wafer Inspection SystemThe LS9300AD from Hitachi is a system for inspecting the front and backside of non-patterned wafer surfaces for particles and defects. In addition to the conventional dark-field laser scattering detection of foreign material and defects, the system is equipped with a differential interference contrast inspection function that enables detection of irregular defects and shallow, low aspect microscopic defects. The LS9300AD also uses the wafer edge grip method, and the rotating stage can be used in conventional products to enable front and backside wafer inspection.

Published: March 2024
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ProductsTest & MeasurementWafersmaterials processingMaterialsindustrialsemiconductorsAsia-PacificHitachi

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