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Wafer Measurement System

Nikon Corp., Digital Solutions Business UnitRequest Info
 
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The NEXIV VMZ-NWL 200 from Nikon is an automatic wafer measurement system developed to solve the challenges of wafer metrology in the back-end of the semiconductor manufacturing process. The product automatically measures 6-in. or 8-in. wafers held in a carrier according to a measurement program. It is possible to trace when the measurement was performed and by which program, helping to improve traceability. The system is designed with safety in mind and a protective cover is provided to prevent possible damage due to operator error. Operation meets SEMI international standards S2, S8, and F47.



Published: August 2023
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ProductsTest & MeasurementSensors & DetectorsautomationSoftwareindustrialsemiconductorsAsia-PacificNikon

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