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Wafer Quality Measurement Tool

ACE Solution Co. Ltd.Request Info
 
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ZHUBEI CITY, Taiwan, March 2, 2023 — The TZ6000 nondestructive wafer quality measurement tool from ACE Solution Co. Ltd. is incorporated with TeraView’s TeraPulse Lx technologies for use in the compound semiconductor industry.

The tool measures thickness, refractive index, resistivity, dielectric constant, surface and subsurface defects at selected positions, and whole wafer scanning map. Terahertz analysis meet the needs of the material inspection in imaging, spectroscopy, and semiconductor applications with a 3200-ps time-delay line. The system’s modular architecture and TeraView patented laser-gated photoconductive emitters and detectors provides flexibility and expandability.

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Photonics.com
Mar 2023
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