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Wafer Vision Inspection Handler

ViTrox TechnologiesRequest Info
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The Wi8i G2 Wafer Vision Inspection Handler from ViTrox Technologies is designed for 2D surface defect inspections and metrology.

The Wi8i G2 features multiple handling mechanisms to support various wafer forms including raw wafer, hoop ring, and framed wafer range from 100 to 300 mm. It can replace conventional human manual visual inspection while providing inspection result data analysis and maintaining consistent, repeatable and reproducibility inspection results. Bottom surface inspection enables the user to inspect sawline and cracks through the wafer frame tape. Users can perform backside/bottom inspection for raw wafer under current defect capability at approximately 200-μm gross defect. The IR inspection solution is designed to inspect inner defects within the device, allowing users to penetrate the silicon layer to inspect for inner layer defects.

The device reduces manufacturing downtime and human handling, improving accuracy and maximizing efficiency.

Photonics Spectra
Feb 2021

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ProductsWi81 G2Wafer Vision Inspection HandlerViTrox TechnologiesWafersTest & MeasurementSensors & Detectorsmachine visionAsia-Pacific

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