Wafer Z Stage

Prior Scientific Inc.Request Info
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Wafer StageThe WP-Z-120A Wafer Stage from Queensgate features ms response times and high bandwidth for positioning in high-throughput applications.

The wafer stage is designed to hold 300-mm wafers, features a load capacity of up to 8 kg, and is suitable for heavy wafer chucks. The stage incorporates capacitive positioning sensors to provide nm-displacement measurement and precision closed-loop feedback. Flexure guidance offers friction-free, reliable motion to >120 µm in closed-loop mode, achieving fast response and settle times with digital closed-loop controllers. Applications include wafer inspection, optical microscopy, and various other inspection techniques.

Published: August 2022
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