Warpage Metrology Tool

ERS electronic GmbHRequest Info
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The Wave3000 warpage metrology tool from ERS electronic GmbH is designed for advanced packaging wafers and the semiconductor manufacturing industry.

The device uses advanced optical scanning methodology to accurately measure and analyze wafer deformities in specific handling positions. It can measure and analyze warped wafers from 200 to 300 mm with high precision in <1 min. The system can measure different wafer surfaces and materials, generate an interactive 3D view of the wafer, and provide insights into warpage behavior and its impact on the manufacturing process.

Published: June 2023
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ProductsWave3000warpage metrology toolERS electronicWaferssemiconductorsindustrialOpticsTest & MeasurementEurope

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