Wear-Resistant Films
Morgan Advanced Materials plcRequest Info
Sacrificial wear layers to extend the life of alumina or beryllia electrostatic chucks (ESCs) for semiconductor, solar and LED applications are offered by Morgan Technical Ceramics, a division of Morgan Advanced Materials PLC.
Diamonex technical hard coats are made of diamond-like-carbon (DLC) and other nanocomposite materials. They are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. They have a range of chemical resistance, meet chamber process compatibility requirements and can withstand high-temperature heated chuck applications.
The hard coats can be applied to new or refurbished ESCs – even ESCs originally designed without a sacrificial wear layer. The technical films are available for chemical and physical vapor deposition, etch, and ion-implant processes. The films feature mesa patterning for low defectivity and can be used in most high-temperature processes.
http://www.morganadvancedmaterials.com
/Buyers_Guide/Morgan_Advanced_Materials_plc/c24475
Published: April 2015
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Morgan Advanced Materials plc by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required