Wear-Resistant Films

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Morgan Advanced Materials sacrificial wear layersSacrificial wear layers to extend the life of alumina or beryllia electrostatic chucks (ESCs) for semiconductor, solar and LED applications are offered by Morgan Technical Ceramics, a division of Morgan Advanced Materials PLC.

Diamonex technical hard coats are made of diamond-like-carbon (DLC) and other nanocomposite materials. They are adjusted to meet specific resistivity requirements of the ESC while protecting electronic layers and extending the overall life of the part. They have a range of chemical resistance, meet chamber process compatibility requirements and can withstand high-temperature heated chuck applications.

The hard coats can be applied to new or refurbished ESCs – even ESCs originally designed without a sacrificial wear layer. The technical films are available for chemical and physical vapor deposition, etch, and ion-implant processes. The films feature mesa patterning for low defectivity and can be used in most high-temperature processes.

Published: April 2015
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