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X-Ray Light Source

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CHELMSFORD, Mass., Aug. 19, 2019 — X-Ray Light SourceThe 642-1 Soft X-Ray (SXR) light source from McPherson Inc. features a six-position anode carousel for the easy changing of anode target materials without breaking vacuum.

The vacuum housing of the source features standard NW40K vacuum flanges. It also features two equivalent output beams, providing the ability for sample/reference comparison and device calibration. The source is easy to set up and provides reliable emission-line source and means for at-wavelength calibration or metrology of SXR lithography materials, multilayers, or grazing incidence optical systems for astrophysics and other fundamental research.

The electron impact light source uses a hot filament to produce electrons subsequently accelerated towards a solid anode target by high voltage. The SXR and extreme UV output emission spectrum follows the target anode material valence band structure.


Photonics.com
Aug 2019
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