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X-Y STAGES OptoSigma Corp. has announced the integration of its linear X-Y stages into a high-resolution scanning curvature and stress measurement system produced by k-Space Associates Inc. The kSA MOS Ultra-Scan is an ex situ tool that maps the induced thin-film stress on semiconductor wafers, optical mirrors, lenses and most polished surfaces. The stages were integrated to provide flexibility and accuracy in the 2-D laser system, which provides an X-Y scanning range of 200 mm with a resolution of 2 µm.

Photonics Spectra
Aug 2005

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k-Space Associates Inclenseslinear X-Y stagesNew Productsoptical mirrorsOptoSigma Corp.positioningsemiconductor wafers

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