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XMS100V Vertical Linear Stage

MKS/NewportRequest Info
 
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XMS100V Vertical Linear StageThe XMS100V is an ultrahigh-precision stage with 50-nm MIM and repeatability. Based on linear motor technology and a direct read analog glass encoder, the XMS100V has better than 1.5-µm accuracy and gets up to 300-mm/s speeds. The air counterbalance can be easily adjusted to different loads and tuned effortlessly through the XPS controller.

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Jul 2014
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