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XYR Alignment Stages

Optimal Engineering Systems Inc.Request Info
 
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XYR Alignment StagesXYR Alignment Stages from Optimal Engineering Systems Inc. offer high precision and repeatability for industrial, medical, semiconductor, research, and laboratory applications.

The XYR-01-01 and XYR-01-02 Alignment Stages feature ±7.5 mm of travel in the X and Y axes, as well as ±180° of rotation. The stages feature linear resolutions of the X and Y axis of 0.25 µm, with repeatability of 1.5 µm, positional accuracy of 5 µm, and a backlash of 2 µm.

The 1-mm/turn ground lead screws and preloaded V-groove and crossed roller bearings help provide high precision and stiffness. The 60-mm diameter theta stage of the XYR-01-01 is driven by a 90:1 precision worm gear; the 100-mm diameter theta stage of the XYR-01-02 is driven by a precision 180:1 worm gear.



Published: September 2019
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