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Z-Theta Motorized Rotary Stage

IPG Photonics, Microsystems Div.
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HOLLIS, N.H., Dec. 6, 2006 -- A new integrated Z-Theta motorized stage from ultraviolet laser maker J P Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning, according to the JPSA-ZTheta.jpgcompany.

Its non-contact operation -- as opposed to typical worm and wheel rotary designs -- reduces maintenance requirements, is less susceptible to wear and is not affected by torque variations because there's no gear interface.

The new Z-Theta stage provides 360° of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.

Advantages of the new rotary stage include:
  • Continuous or limited travel
  • Excellent accuracy and repeatability
  • A cog-free motor for smooth motion
  • Zero gear backlash
  • Low wobble and bearing run-out
  • No accuracy changes over time due to gear wear
The stage is ideal for laser micromachining applications and wafer processing, among other applications, the company said. Resolution (microns/arc seconds) is 0.25 µm in the Z-axis and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z-axis, and ±1 arc second for Theta.

JPSA operates a high-performance ultraviolet laser job shop as well as a systems engineering and manufacturing business. For more information, visit:; e-mail:

J P Sercel Associates (JPSA) 
17D Clinton Dr.
Hollis, NH 03049
Phone: (603) 595-7048
Fax: (603) 598-3835
Dec 2006
DPSSindustrialJ.P. SercelJPSAlaser micromachiningmicromachiningmotorized stagephotonicsProductsThetaUVWafersZ-Thetalasers

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