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g2T Beam Profiling, Scanning System

Photonics.com
Jan 2010
LIMO GmbHRequest Info
 
DORTMUND, Germany, Jan. 4, 2010 – LIMO Lissotschenko Mikrooptik GmbH has introduced the g2T beam profiler and scanning system, a two-in-one system that combines two optical concepts: the transformation of Gaussian beams into homogeneous top-hat profiles and a scan method involving galvo mirrors and a specifically designed f-Theta objective lens.

LIMO_g2T-scansystem.jpgIt was constructed for laser direct materials structuring with single-mode lasers, especially at 532 nm and in particular for solar cell manufacturing. The Fraunhofer Institute for Solar Energy Systems has applied this technology and has demonstrated ablation of thin films on the basis of a 75-nm SiN layer on Si and achieved a precise result without causing any damage to deeper layers.

In comparison to Gaussian beams, the throughput can be increased by the use of g2T profiles because of smaller pulse-to-pulse spatial overlaps.

Standard spot sizes of 50 × 50 µm2 can structure high-precision grooves with smooth edges in contrast to the typical sawtooth-patterns caused by Gaussian beams. The process window is enhanced and thermal damages are reduced by the homogeneous profile. With a scan field size of 155 × 155 mm², standard solar cells can be structured cost-effectively in one production run and with high throughput.

For more information, visit: www.limo.de    

LIMO Lissotschenko Mikrooptik GmbH
Bookenburgweg 4-8
D-44319 Dortmund
Germany
Phone: +49 231 2224 10
Fax: +49 231 2224 1140


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beam profilerenergyEuropef-Theta objective lensFraunhofer Institute for Solar Energy Systemsg2Tgalvo mirrorsGaussian to top-hatGermanygreen photonicsindustriallaser direct materials structuringlensesLimo Lissotschenko Mikrooptikmirrorsopticsphotonicsphotonics.comProductsscanning systemsingle-modesolar cell lmanufacturingthin-film ablationlasers

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