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intelliSCANse Digital Encoder Galvanometer Scan Heads

SCANLAB GmbHRequest Info
 
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Scanlab AG has introduced its intelliSCANse series 10- and 14-mm-aperture digital encoder galvanometer scan heads for electronic component and display manufacturing and for semiconductor processing.

The devices offer interferometric position sensing with high resolution and low dither and drift, ensuring high accuracy under varying environmental and processing conditions. Their ultralow-inertia design has been patented.

The scan heads also offer the flexibility of switchable tunings and an assortment of cooling and mechanical options.

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EuroPhotonics
Dec 2013
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