UV-LED Photolithography Imparts Micro Features
HANNOVER, Germany, Jan. 18, 2024 — Technologies like integrated signal distributing, processing, and sensing networks require basic optical elements such as waveguides, splitters, gratings, and optical switches to be miniaturized. This poses challenges, especially for curved elements such as bends and ring resonators, which require an especially high resolution and lower sidewall roughness. There are a number of methods to achieve subwavelength high-resolution manufacturing, though they tend to be costly, complex, and