8-in. Helios Sputtering System
CARY, N.C., Nov. 12, 2010 — Leybold Optics USA Inc. has extended the product range for its Helios sputtering tool for optical coatings. After launching the standard 4-in. model, it is now manufacturing Helios sputtering tools that feature 12 substrate stations, each measuring 8 in. The new model offers much higher throughput.
It features up to three dual magnetrons and a radio-frequency plasma source. The substrates are placed on a turntable that rotates at 240 rpm. For use in the semiconductor industry, it is...
Buhler Inc., Business Area Leybold Optics