Advances in Nanometer Precision Motion Control in Industry and Research1) High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing. High-speed synchronization, high throughput and reliability are no longer mutually exclusive with sub-µm accuracy.
2) Nanopositioning mechanisms aid progress in fields as diverse as genomics, photonics, defense, and semiconductors. The latest designs include hexapods, compact air bearings and...