Piezocube
Jun 7, 2010 — PI (Physik Instrumente) GmbH & Co. KG has introduced a piezocube for 3-D structuring applications. The NanoCube P-611 X-Y-Z nanopositioning system’s travel ranges are up to 100 x 100 x 100 μm. It is driven by piezo actuators and achieves resolutions of up to 0.2 nm at millisecond response times and with nanometer repeatability. Vacuum-compatible, it operates over a wide temperature range. Applications include semiconductor manufacturing, optical metrology, micromachining, photonics...
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics