Immersion Lens Focuses Radially Polarized Beam for Laser Nanoprocessing
SENDAI, Japan, April 9, 2024 — High spatial resolution in ultrafast laser processing is increasingly important in semiconductor fabrication, the automotive parts industry, medical device manufacturing, and other fields. In laser processing, precision and spatial resolution are primarily influenced by the focal spot size of the laser beam. The diffraction of light typically limits the achievable spot size, depending on the numerical aperture (NA) of the lens and the wavelength of the focused laser beam. A research team