The Practicalities of Building Reliable Deep-UV Optics
When microlithography at 157 nm was first being investigated several years ago, optics that could survive 10 million laser pulses were the benchmark of performance. Today, pulse-count lifetimes of 40 billion pulses represent the state of the art. To achieve this, virtually every aspect of the traditional fabrication of deep-UV optics, including coating, testing and packaging processes that are used for longer-wavelength components, has had to be reviewed and refined.Progress in each of these...
Photonics Spectra, October 2002