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Research & Technology News

Excimer Lasers, High-NA Optics Push Lithography

Jul 1, 1997 — BALTIMORE -- Developments in excimer lasers and high numerical aperture optics technology are pushing photonics into the forefront of semiconductor microlithography, where laser-created feature sizes have already dipped below 0.25 µm.David Shaver of Massachusetts Institute of Technology's Lincoln Laboratory in Cambridge, Mass., told the CLEO '97 plenary audience that development of a generation of systems based on 193-nm ArF excimer lasers is under way. If they prove successful, feature...

Just One Second!

Jul 1, 1997 — To keep the world's atomic clocks synchronized with the Earth's rotation, the National Institute of Standards and Technology's Time and Frequency Div. added a "leap" second June 30. This is the 21st adjustment to the world's time scale since 1972...

Lidar Monitors Vapor, Wind

Jul 1, 1997 — Researchers at the Max-Planck-Institut für Meteorologie are developing a ground-based differential absorption lidar technique to remotely monitor water vapor and take wind measurements. A frequency-doubled Nd:YVO laser pumps a continuous-wave...

Pigment Holds Promise for 3-D Machine Vision, Optical Computing

Jul 1, 1997 — JERUSALEM -- A saltwater-borne bacterium may provide the key to the development of parallel optical computers and real-time 3-D robotic vision. Bacteriorhodopsin, the pigment protein derived from the bacterium, possesses unique electro-optical...

Putting Photons on Hold Improves Processing

Jul 1, 1997 — To store or process information encoded as light signals, it is often necessary to slow down strings of photons.A group of scientists from the University of Munich has developed a semiconductor device that serves as a quantum well, which...

Quantum Cascade Laser to Play Key Role in Gas Detection

Jul 1, 1997 — MURRAY HILL, N.J. -- A new laser-based sensor could mark a breakthrough in the detection of minute quantities of trace gases and pollutants.The exceedingly sensitive device is capable of detecting pollutants in parts per billion, according to one of...

Samarium Laser Emits X-Rays

Jul 1, 1997 — A group of British scientists successfully demonstrated the operation of a saturated nickel-like samarium x-ray laser beam at 7 nm with an output energy of 0.3 mJ in 50-ps pulses. The narrow divergence, short wavelength and pulse duration and...

Technique Offers Real-Time 3-D Microscopy for Materials

Jul 1, 1997 — JENA, Germany -- German microscope manufacturer Carl Zeiss Jena GmbH has developed a technique that it says provides three-dimensional, real-time microscopic images with the high resolution and sharp contrast of conventional light microscopy.The...

Two-Photon Imaging Offers Backside Peek at Chips

Jul 1, 1997 — Single-photon, optical beam-induced- current imaging is a valuable tool for the quality control of integrated circuits. However, this technique has become increasingly ineffective because of the large number of layers added to the front side of the...

Ultraviolet Laser Combines Steps in Wafer Doping

Jul 1, 1997 — SAN JOSE, Calif. -- An instrument that employs a laser doping process could combine the lithography and silicon doping steps in the manufacture of integrated circuits.The device, a deep-UV stepper using a technique that Ultratech Stepper Inc. calls...

US Strengthening Flat Panel Display Manufacturing Technology

Jul 1, 1997 — The United States Display Consortium, a group of flat panel display manufacturers and developers, has initiated 33 projects to bolster the US infrastructure and supply base.The consortium has committed $107 million to R&D projects over the past...

UV Imager Catches Comets Targeting Earth

Jul 1, 1997 — BALTIMORE -- Having a winning design for a satellite imaging device can have rewards beyond the recognition associated with winning a NASA contract. Just ask Iowa University's Louis A. Frank, who designed a UV/VIS imager to study the Earth's aurora,...

X-Ray Tool Aids Laser Design

Jul 1, 1997 — MURRAY HILL, N.J. -- Scientists at Bell Laboratories have developed a tool that uses x-ray technology to measure strain in small volumes of material for laser manufacturing and quality control applications.According to the company, the x-ray...

'Superlattice' Laser Achieves Record Power in the Mid-IR

Jun 1, 1997 — MURRAY HILL, N.J. -- Lucent Bell Laboratories researchers have reported measuring peak power of 750 mW from a pulsed 8-µm laser at liquid nitrogen temperatures.The device, a quantum cascade laser based on superlattice crystal structures,...

Air Force Lab Chills IR SensorsInternational Team Takes Mid-IR Laser Step

Jun 1, 1997 — Scientists have moved a step closer to achieving a tunable, mid-infrared semiconductor laser, demonstrating an intersubband stimulated emission.A team of researchers from the University of Illinois and the University of Paris conducted tests...

Conoscopy Measures with High Resolution

Jun 1, 1997 — JERUSALEM -- Manufacturers of electronic components and data storage equipment are among those who can benefit from the high (up to 0.04 µm) resolution of gauging instruments based on conoscopic interferometry.The technique exploits the...

Corning Completes Telescope Mirror Blank

Jun 1, 1997 — Corning Incorporated has delivered the second of two mirror blanks for the GEMINI project telescope, a multinational collaboration including the US, UK, Canada, Chile, Argentina and Brazil. The mirror blank measures more than 26 ft in diameter and...

Crystal Films Grow on 'Universal' Substrate

Jun 1, 1997 — Cornell University researchers are in the preliminary stages of demonstrating that crystals of any material can be grown on a substrate. If the technique proves successful, it could open the door for manufacturing a whole new class of...

Dutch Group Monitors Laser Deposition

Jun 1, 1997 — Pulsed laser deposition creates complex oxide thin films such as high-Tc superconductors, but it works only under high oxygen pressure (up to 100 Pa). Reflection high energy electron diffraction (RHEED) can monitor the growth of thin films, but only...

Integrated Circuit Uses 'Critters' to Detect Contamination

Jun 1, 1997 — OAK RIDGE, Tenn. -- What's half living, half machine and can sniff out pollutants and chemicals in a single whiff? The latest microsensor technology from the US Department of Energy's Oak Ridge National Laboratory (ORNL) combines living luminescent...

IR Instrument Vows Early Warnings of Volcanic Eruptions

Jun 1, 1997 — TEMPE, Ariz. -- Hollywood's recent fantastic images of fiery lava engulfing entire cities might be a slight exaggeration, but the danger of volcanoes to humans is all too real, especially to researchers seeking a closer look at what makes these...

Lab Produces Tunable Mid-IR Laser

Jun 1, 1997 — Researchers at Lucent Technologies' Bell Laboratories have produced a pulsed, single-mode laser tunable in the mid-infrared range. The group achieved peak optical powers up to 60 mW at 300 K with a tuning range of about 60 nm from 100 K to 2320...

New Cantilever Boosts SFM Resolution

Jun 1, 1997 — STANFORD, Calif. -- Stanford University researchers have combined an interferometric diffraction grating with light-reflecting scanning force microscope cantilevers in a way that could result in a tenfold increase in the resolution of commercially...

New Photoresist Shrinks Features

Jun 1, 1997 — SAN FRANCISCO -- Integrated circuit manufacturers are taking a very close look at a single-layer photoresist that scientists say will support component design smaller than 0.18 µm, with the promise of 0.13-µm design capability within a...

Photonics Solves the Wafer Temperature Problem

Jun 1, 1997 — SANTA CLARA, Calif. -- As a semiconductor wafer wends its way through the fabrication process it passes through several stages where thermal processing plays a key role.Conventional techniques require that manufacturers stop the process, remove the...

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