DEEP-UV MICROSCOPE
Aug 1, 1999 — The Axiotron UV from Carl Zeiss Jena GmbH is a deep-UV microscope designed for quality control and defect classification of structures smaller than 2 µm. It comes with dry objectives, Epi-Ultrafluar 120x/0.95 for 248 nm and Epi-APO 80x/0.95 for 365 nm for use in a production environment, and with glycerin immersion objectives, including Ultrafluar 100x/1.3 for failure analysis. Magnifications greater than 25,000x can be achieved by using a cooled, high-resolution UV-enhanced CCD camera.
Carl Zeiss Microscopy LLC