MULTIAXIS STAGES WITH SUBNANOMETER RESOLUTION
Aug 1, 1997 — Physik Instrumente GmbH & Co. has developed the P-517.2C and P-527.2C X-Y piezoelectrically driven flexure stages. They feature 100 3 100- and 200 3 200-µm X-Y travel ranges, integrated capacitive displacement sensors, subnanometer resolution...
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics