Optical Metrology Breaks Barriers
Jun 29, 2016 — At one time, the diffraction limit, half the wavelength of light, acted as a cutoff to optical measurement. That’s no longer the case. Superresolution techniques now allow optical metrology well below that point in the XY direction, while interferometry and other approaches produce precise optical measurement in the Z, or vertical, direction. Other innovations involve laser speckle analysis and the combination of different technologies, enabling better metrology on ever smaller features. On the...