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MEMS Dictionary Terms
optical fiber optic switches
Optical fiber optic switches are devices used in optical fiber communication systems to selectively route optical signals from one input fiber to one or more output fibers. They play a crucial role in managing and controlling the flow of optical...
spatial light modulator
A spatial light modulator (SLM) is an optical device that modulates or manipulates the amplitude, phase, or polarization of...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of...
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and...
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the...
MEMS fiber optic switch
A MEMS fiber optic switch is a microelectromechanical system (MEMS) device designed to selectively route optical signals...
wafer
In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a...
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and...
Casimir force
The Casimir force is a quantum phenomenon that results in an attractive force between two closely spaced uncharged...
accelerometer
An accelerometer is a sensor or transducer that measures the rate of change of velocity of an object, or in simpler terms,...
MEMS
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit...
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level....
liquid crystal on silicon
Liquid crystal on silicon (LCoS) is a display technology that combines liquid crystal materials with silicon-based...
micro-robotics
Micro-robotics refers to the field of robotics that involves the design, development, and application of miniature robotic...
(15 results found)
April 2024
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