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excimer laser Products
Laser Monitoring Software
OYAMA, Japan, July 13, 2015 — Gigaphoton Inc. has announced new Web-based monitoring software for excimer lasers used in semiconductor manufacturing. REDeeM Cloud is designed to help users collaboratively analyze performance data and minimize downtime. In the future, the application will allow users to develop their own unique features, extensions and user interfaces.
Gigaphoton Inc.
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Excimer Laser for FBG Writing
SANTA CLARA, Calif., Feb. 17, 2012 — The new BraggStar M from Coherent Inc. is an excimer laser that delivers high pulse energy and spatial coherence for fiber Bragg grating (FBG) writing. High pulse energy is a critical advantage in some FBG writing applications, and high...
Coherent Inc.
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Excimer Laser
Jul 1, 2010 — Coherent Inc. has added a new model to its Indy-Star family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput. The fully Semi S2-certified laser incorporates several new output stabilization features for improved...
Coherent Inc.
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IndyStar Excimer Laser
SANTA CLARA, Calif., April 7, 2010 — Coherent Inc. has added a new model to its IndyStar family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput. The fully Semi S2-certified laser incorporates several new output stabilization features for...
Coherent Inc.
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Little Excimer, Big Power
EDINBURGH, England, June 26, 2008 – And in this corner, weighing in at only 14kg, measuring 47 x 25 x 25cm and supplying up to 7.5W at 248nm and 3.5W at 193nm, is Gam Laser’s new EX5 mini excimer laser. Distributed by Photonic Solutions, this air cooled EX5 excimer is fully...
GAM Laser Inc.
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EXCIMER LASER
Dec 1, 2007 — Xantos XS, manufactured by Coherent Inc., is a self-contained excimer laser with an internal gas compartment consisting of a premixed laser gas bottle and all necessary gas supply equipment for laser operation. Gas can be refilled automatically...
Coherent Inc.
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Xantos XS Excimer Laser
SANTA CLARA, Calif., Sept. 10, 2007 -- Coherent Inc. said its new Xantos XS features an integrated gas compartment, a unique feature in the excimer laser market that makes laser operation as flexible as possible. The internal gas compartment of this self-contained excimer laser...
Coherent Inc.
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Pulse-Energy Sensors
SANTA CLARA, Calif., July 2, 2007 -- New pulse-energy sensors from Coherent Inc. are optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. The EnergyMax series sensors feature high accuracy and a large active area and use a novel coating that delivers...
Coherent Inc.
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EXCIMER LASER
Apr 1, 2007 — Gigaphoton Inc. has expanded its GT series of argon-fluoride light sources with the GT61A excimer laser. The device has an emission wavelength of 193 nm, a repetition rate of 6000 Hz and pulse energy of 10 mJ. It is designed for lithography tools...
Gigaphoton Inc.
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Tech Spec Excimer Laser Mirrors
BARRINGTON, N.J., Oct. 24, 2006 -- Edmund Optics expands its laser mirror line with the introduction of Tech Spec High Energy Excimer Laser Mirrors. These mirrors are designed to minimize scatter from high power ultraviolet (UV) lasers, including krypton-fluoride (248 nm),...
Edmund Optics Inc.
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EXCIMER LASERS
Sep 1, 2006 — Coherent Inc. has expanded its Lambda SX industrial excimer laser series with the addition of three models, each operating at up to 300 Hz. The LSX 200C delivers 200 W at 308 nm (XeCl); the LSX 200K, 200 W at 248 nm (KrF); and the LSX 300K, 300 W at...
Coherent Inc.
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ExciStar XS Excimer Laser
SANTA CLARA, Calif., July 24, 2006 -- The new ExciStar XS from Coherent Inc. is a compact, economical excimer laser that the company said offers exceptional performance and lifetime characteristics. The air-cooled ExciStar XS measures only 649 x 300 x 400 mm, yet delivers up to 10...
Coherent Inc.
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Excimer Laser Mirrors
BOULDER, Colo., May 30, 2006 -- Alpine Research Optics (ARO) has introduced a new series of high-performance flat mirrors intended for general purpose beam-steering tasks in ultraviolet excimer laser-based applications such as microlithography, micromachining, materials processing...
Alpine Research Optics
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EXCIMER LASER
Dec 1, 2005 — The Lambda SX 315C manufactured by Coherent Inc. is an excimer laser designed to reduce cost and to improve yield and throughput in flat panel display manufacturing. Optimized for the low-temperature polysilicon crystallization used in the process,...
Coherent Inc.
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ENERGY MEASUREMENT
Mar 1, 2003 — Ophir Optronics Inc. has introduced a pyroelectric head with a high-damage-threshold coating for 193-nm radiation. The PE50HD, designed for energy measurement of excimer lasers, is calibrated for 157 nm and 10.6 µm. The pulse energy head has a...
MKS Ophir, Light & Measurement
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(15 results found)
April 2024
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