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Ultrahigh-Precision Optical Surfaces: Fabrication Examples, Challenges, and Recent Approaches

Jan 10, 2023
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High-precision lenses and mirrors for short wavelength light, including deep-UV (DUV) and x-ray, are manufactured by fully utilizing both traditional polishing techniques, which require empirical knowledge through trial and error, and modern polishing and surface-measurement techniques.

Kume provides an overview of techniques and innovations in manufacturing high-precision optical surfaces (unique-shape lenses, CaF2 lenses, x-ray mirrors, etc.).

Additionally, he showcases recent approaches to overcome technical challenges related to surface quality to fabricate ultrahigh-precision optical surfaces for short-wavelength light.

***This presentation premiered during the 2023 Photonics Spectra Conference. For more information on Photonics Media conferences, visit

About the presenter

Takehiro KumeTakehiro Kume, Ph.D., is an optical manufacturing engineer working in the R&D lab at Natsume Optical Corp.

His primary focus is on the development of fabrication and metrology techniques for optical components with nanometer precision, such as x-ray mirrors. He holds a doctorate in precision engineering from the University of Tokyo.
opticsoptical fabricationlappingpolishing
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