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Designing and Selecting an Optical Cleaning Process

Author: Matthew Brophy, Stefan Napp, Pete Kupinski, Jon Watson, Rebecca Whitsitt
Wednesday, November 01, 2017
Every optical application requires a "clean" optical surface. However, what defines "clean" is subjective and is based on the needs of the application. In addition, there is not a singular low-cost cleaning process that can meet all the demands of every application. Therefore, multiple cleaning operations need to be developed, where each process is tailored to meet specific requirements. For example, optics operating at UV wavelengths require a specific and comprehensive cleaning process in order to reduce absorption, lower fluorescence, and increase exposure lifetime. Similarly, a specific and comprehensive cleaning process is also required for high-power optics that operate in the near-infrared.
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Optimaxopticslow absorptionlow fluorescencelithography applicationsUV applicationsoptical cleaning processDUV cleaning
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