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PI Physik Instrumente - January 2023 FS LW LB

Advances in Nanometer Precision Motion Control in Industry and Research

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Author: Scott Jordan, Brian Lula, Stefan Vorndran
Monday, April 20, 2020
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics

1) High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing. High-speed synchronization, high throughput and reliability are no longer mutually exclusive with sub-µm accuracy.

2) Nanopositioning mechanisms aid progress in fields as diverse as genomics, photonics, defense, and semiconductors. The latest designs include hexapods, compact air bearings and piezo-motors.

File: PI_Advances_in_Nanometer_Precision_Motio.pdf (1.46 MB)
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laser machiningadditive manufacturingPrecision Industrial Automationprecision motion controlmotion controllerNanopositioningair bearingslinear motorsACS Motion ControlHexapod AlignmentMulti-Axis AutomationNano-Automationpiezo stagenanopositionerlinear stageHexapodlinear motordirect drive motorinertia motorstick-slip drivepiezo flexure mechanismvoice coil
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