Advances in Precision Motion Control – Air Bearings and Piezo Flexures

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Author: Scott Jordan and Stefan Vorndran
Monday, March 14, 2022
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics

Air Bearing Stages and Piezo Flexures Nanopositioning Stages – What to Use When? Both are on the leading edge of motion control. Whether it’s the vibration-free frictionless motion, geometric performance and repeatability of an air bearing or the precision, speed, and force of an solid-state piezoelectric actuator, they enable progress in photonics, semiconductor test/measurement, super-resolution microscopy and industrial precision automation.

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File: 2022_03_Air_Bearings_and_Piezo_Actuators_Motion_Control_Applications.pdf (1.53 MB)
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air bearingsprecision motion controlhigh-speed motionamplified actuatorslaser processingnanometer precisionpiezo actuatorpiezo motorNanopositioningpiezoelectric actuatorsManufacturing Equipment for Photonics Componentspositioning/vibration-isolation equipmenttest & measurement equipment
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