Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Characterization of Advanced Semiconductor Materials and Processes with Nanoscale IR Spectroscopy

Facebook Twitter LinkedIn Email
Author: Stephen Hopkins
Wednesday, March 31, 2021
Bruker Nano Surfaces

This application note demonstrates the successful application of Tapping AFM-IR to distinguish the chemical footprints of several nanoscale lithographic patterns consisting of complex molecular assemblies with excellent spatial resolution of 4 nm. Additionally, nanoscale IR spectroscopy also excels in the characterization of nanoscale defects.

File: Characterization_of_Advanced_Semiconductor_Materials.pdf (3.49 MB)
To download this application note, please complete the *required fields before clicking the "Download" button.
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:

When you click "Download", you agree that your personal contact information may be shared with Bruker Nano Surfaces and they may contact you about their products and services in the future. You also agree that Photonics Media may contact you with information related to this request, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required
Materials & Chemicalsnanophotonicsspectroscopy equipmentmaterials researchspectroscopysemiconductorsnanoscale infrared spectroscopynanoIRAFM-IRFTIRPTIRchemical identificationphotothermal IR spectroscopy
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2023 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.