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Displacement Feedback for Closed Loop Nanopositioning Systems

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Author: Dr. Danilo M. Schmidt
Wednesday, January 30, 2019
attocube systems AG

Piezo-based nanopositioners for moving objects in nanometer range require ultra-precise displacement sensors to increase motion stability and accuracy. A nine axis positioner setup was implemented in a high vacuum environment and our laser interferometer was used for displacement feedback. This closed loop positioning system provided a stability of a few nanometers, while the IDS3010 was capable of identify even steps of 10 pm. In this specific setup, in total three IDS3010 were used for eight measurement axes that were synchronized by the BiSS-C interface.

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positioningSensors & DetectorsTest & Measurementvibration analysislaser interferometerpiezo actuatorsvacuum compatibleclosed loop positioning
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