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Fabricating Low Loss GeO2 Thin Films for Planar Waveguides using Intlvac's Nanochrome IV PARMS System

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Author: Yiorgio Mathioudakis
Tuesday, September 1, 2020
Intlvac Thin Film Corp.

High quality GeO2 thin films that exhibit low loss and low surface roughness were produced by Intlvac’s Nanochrome IV PARMS system, proving that ion assisted AC dual sputtering is an effective fabrication technique. This is highly applicable to planar waveguides such as Photonic Integrated Circuits (PICs). PICs look to solidify themselves as the new foundation of next gen electronics and the time to push for innovation and investment in this technology is now.

File: GeO2_Marketing_White_Paper.pdf (1.17 MB)
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coatingsMaterials & Chemicalsoptical componentsoptical softwareoptical waveguidesPhotonics Integrated CircuitsPICsintegrated circuitsfiber opticsgermaniumthin-film depositionrefractive indexmaterials science
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