Search
Menu
Lambda Research Optics, Inc. - Limited Time Offer

Multilayer Coating for Extreme Ultraviolet Experiments

Facebook X LinkedIn Email
Author: Masatoshi Hatayama
Friday, December 4, 2020
NTT Advanced Technology Corp.

Extreme ultraviolet (EUV) multilayer coatings have been designed and fabricated for many kinds of experiments including high-order harmonics application. In this paper, we present recent results obtained with Ru/B4C, Mo/Si, Zr/Al-Si, SiC/Mg multilayer coatings, at corresponding wavelength region of 8 nm – 50 nm. These multilayer coatings can be easily customized depending on experimental requirements, including the incident angle, peak wavelength, and bandwidth.

Download Application Note
File: MLM20201125.pdf (975.61 KB)
To download this application note, please complete the *required fields before clicking the "Download" button.
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:




When you click "Download", you agree that your personal contact information may be shared with NTT Advanced Technology Corp. and they may contact you about their products and services in the future. You also agree that Photonics Media may contact you with information related to this request, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required
CoatingsOpticsspectroscopyEUVextreme ultravioletmirrorsmultilayer coatingsmultilayer13.5 nm
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.