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Multilayer Coating for Extreme Ultraviolet Experiments

Author: Masatoshi Hatayama
Friday, December 4, 2020
NTT Advanced Technology Corporation

Extreme ultraviolet (EUV) multilayer coatings have been designed and fabricated for many kinds of experiments including high-order harmonics application. In this paper, we present recent results obtained with Ru/B4C, Mo/Si, Zr/Al-Si, SiC/Mg multilayer coatings, at corresponding wavelength region of 8 nm – 50 nm. These multilayer coatings can be easily customized depending on experimental requirements, including the incident angle, peak wavelength, and bandwidth.

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Multilayer Coating for Extreme Ultraviolet Experiments