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Sapphire for Semiconductor Manufacturing Equipment

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Wednesday, June 22, 2022
Saint-Gobain Crystals

Sapphire's extremely high fluorine plasma resistance AND lower particle generation make an excellent choice for semiconductor chamber windows for increased productivity and throughput, less maintenance due to reduced equipment downtime and reduced part inventory levels.

File: Sapphire_for_Semiconductor_Manufacturing.pdf (1.21 MB)
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semiconductorsemiconductorchamber windows,chamber windowsdry etch,dry etchwet etch,wet etchHPD,HPDCVD,CVDPECVD,PECVD
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