Semiconductor Inspection Using the CRONUS-2P Laser

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Author: Torben Purz and Eric Martin (Monstr Sense Technologies)
Thursday, January 18, 2024
Light Conversion

Inspection plays a critical role in today’s semiconductor manufacturing. Nonlinear optical techniques present compelling advantages, but require lasers producing femtosecond pulses at adjustable wavelengths. Here, we discuss the application of Light Conversion’s CRONUS-2P femtosecond laser for pump-probe imaging of wafers using the ultrafast microscope developed by MONSTR Sense Technologies, utilizing nonlinear imaging to detect defects in raw materials and devices.

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semiconductorwaferfemtosecondlaserultrafastmicroscopenonlinearpump-probeImagingdevice inspectionmaterial inspectionband structuremicro-OLEDfour-wave mixing
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